Convergence of Displacements for the Test Problem Using Quadratic and Cubic

The fixed-fixed plate test problem. The plate undergoes a maximum of 2 µm of deflection, which corresponds to a pull-in of a switch fabricated in the Poly1 layer in MUMPs. Geometric nonlinearity (large deflections and rotations) is accounted for in the simulations. (a) Length = 400 µm, width = 40 µm, thickness = 2 µm, pressure =-5*10-9 N/µm 2 , Young's Modulus = 0.136 GPa, Poisson's ratio = 0.23. (b) Deformed hexahedral mesh. (c) Deformed tetrahedral mesh. [scale factor of 20 on the displacements] L t p (a) (b) (c) Fig. 4: The convergence of the maximum displacement of the plate. Notice that for the converged solution (assumed to be 0.99 of maximum displacement), the cubic tetrahedrons and quadratic bricks perform approximately the same.